电沉积钕铁硼磁性薄膜工艺

Electrodeposition of neodymium iron boron magnetic thin film

采用循环伏安法在铜电极上进行了NdFeB稀土永磁薄膜电沉积的初步探索。镀液组成为:FeCl240g/L,H3BO336g/L,抗坏血酸1.2g/L,十二烷基硫酸钠0.1g/L,甘氨酸、氯化铵各30g/L(作为配位剂),NdCl38～16g/L。探讨了配位剂对该体系镀液循环伏安特性的影响,并研究了镀液中NdCl3含量和电沉积终止电位对镀层形貌和外观的影响。结果表明,镀液中加入配位剂后,Fe2+起始沉积电位负移,而Nd3+的还原电位正移。Fe元素能诱导Nd元素进行共沉积,实现在水溶液中电沉积制备稀土永磁薄膜。循环伏安沉积的终止电位和镀液中NdCl3的含量对NdFeB薄膜的形貌和外观影响较大。镀液中NdCl3为8g/L、终止电位为1.7V时,可制得Nd的质量分数高达5.69%、较光亮致密的NdFeB薄膜。

The deposition of NdFeB rare earth permanent magnetic film on copper electrode by cyclic voltammetry method was preliminary explored. The bath composition is as follows： FeC1240 g/L, H3BO3 36 g/L, ascorbic acid 1.2 g/L, sodium dodecyl sulfate 0.1 g/L, glycine （as complexing agent） 30 g/L, ammonium chloride （as complexing agent） 30 g/L, and NdCl3 8-16 g/L. The effect of complexing agent on cyclic voltammetric characteristics of the given bath was discussed. The effects of NdC13 content in bath and the terminal potential of electrodeposition on morphology and appearance of coatings were studied. The results show that the initial deposition potential of Fe2＋ shifts negatively while the reduction potential of Nd3＋ moves to positive direction after the addition of complexing agents to bath. The codeposition of Nd can be induced by Fe, realizing the electrolytic preparation of rare earth permanent magnet filmin aqueous solution. The terminal potential in cyclic voltammetric electrodeposition and the NdCl3 content in bath greatly affect the morphology and appearance of NdFeB film Bright and fine NdFeB films with a mass fraction of Nd up to 5.69% can be obtained with NdCl3 8 g/L in bath and at terminal potential of-1.7 V.