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含有柱状隔垫物彩膜基板的剥离技术

Film Stripping from Color Filter Substrate with Photo Space Layer
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摘要 介绍了一种含有柱状隔垫物彩膜基板的剥离技术。采用层数顺序方法,两步剥离工艺。第一步,采用剥离液,进行260s,迅速剥离柱状隔垫物层;第二步,刻蚀液进行650s和剥离液进行650s共同作用,先后剥离玻璃基板上透明导电氧化铟锡层、颜色层,挡光层。使之剥离后成为可以再次利用的干净白玻璃。 A new film stripped technology from color filter substrate with photo space layer was presented. Two steps were used. The first step was that the photo space was easily stripped by stripper used for 260 s. The second step was that etcher and stripper were used for 650 s in this process. The result was that the ITO & Color & light blocking layers could be stripped completely. Finally, color filter substrate changed to the bare glass back that could he re-used.
出处 《液晶与显示》 CAS CSCD 北大核心 2013年第2期220-223,共4页 Chinese Journal of Liquid Crystals and Displays
关键词 剥离技术 柱状隔垫物层 金属氧化铟锡 刻蚀液 剥离液 strip technology photo space layer indium tin oxide film etcher stripper
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