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RF-PECVD法在不同的基底上生长纳米金刚石及碳纳米管/纳米金刚石复合物 被引量：2

Nanodiamond and CNTs/nanodiamond composites on different substrate synthesized by RF-PECVD
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摘要 采用PECVD技术,在氯化钠基片上合成了纳米金刚石,并研究了其生长机制.采用同样的技术,以硅片为基底,选用不同的沉积参量,分别合成了纳米金刚石、碳纳米管及碳纳米管/纳米金刚石复合物,研究了其场发射性能.实验结果表明:碳纳米管/纳米金刚石复合物的场发射性能优于碳纳米管和纳米金刚石的场发射性能. The nanodiamond was synthesized on NaCl substrate using PECVD, and the growth mechanism was investigated. CNTs, nanodiamond and CNTs/nanodiamond composites on silicon sub- strate were synthesized by PECVD, via different deposition conditions, and their field electron emis- sion properties were investigated. The experimental results showed that CNTs/nanodiamond compos- ites had a better field electron emission property than nanodiamond and CNTs.
作者 徐强 杨光敏 秦宏宇
机构地区 长春工程学院勘查与测绘工程学院 长春师范学院物理学院
出处 《物理实验》 2013年第4期9-13,共5页 Physics Experimentation
关键词 纳米金刚石 碳纳米管 碳纳米管 纳米金刚石复合物 等离子体增强化学气相沉积 场发射 nanodiamond CNTs CNTs/nanodiamond composites PECVD field electron emis- sion
分类号 O484 [理学—固体物理]
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参考文献8

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二级参考文献9

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共引文献3

同被引文献30

  • 1曲典,姚兰芳,朱永安,岳春晓.纳米多孔SiO_2-TiO_2复合薄膜的制备及研究[J].上海理工大学学报,2006,28(2):111-114. 被引量：7
  • 2张文锋,曾葆青,赵艳珩,赵约瑟,杨中海.碳纳米管/聚四氟乙烯复合材料场发射特性研究[J].功能材料,2006,37(7):1118-1120. 被引量：3
  • 3杨益,杨盛良.碳纳米管增强金属基复合材料的研究现状及展望[J].材料导报,2007,21(F05):182-184. 被引量：25
  • 4欧阳海东,赵艳珩,王挥,曾葆青.碳纳米管/二氧化硅复合材料制备及场发射特性研究[J].材料导报,2007,21(F05):204-205. 被引量：1
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引证文献2

二级引证文献4

物理实验
2013年 第4期

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