纳米操纵机器人及其自动化设计(英文)

Nanorobotics and automation

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摘要在纳米技术和纳米材料领域,纳米操纵机器人已经成为一种用于分析和制作原型纳米器件的使能技术。这类纳米操纵机器人拾放操作灵活,可将单个纳米器件集成到现有的微器件中来提高微器件的总体性能和灵敏度。如今这种被称作微纳米集成装配的自动化装置不再局限于实验室使用,还需要应用于工业领域。本文综述了纳米微操作机器人的产生、集成装配和自动化等方面的基础技术,同时探讨了不同种类原子力显微镜超级探针的装配方案。 Nanohandling robots have become an enabling technology for analysis and prototyping in the field of nanotechnology and nanomaterials. Nanorobotic pick-and-place operations facilitate the flexi- ble integration of individual nanostructures into existing micro devices increasing their overall per- formance and sensitivity. The automation of this so-called robotic micro-nano-integration is required to establish the technology not only in research labs, but also in industrial areas. In this paper, basic technologies for the development, integration and automation of nanohandling robots are presented. In addition, special handling strategies for the assembly of different kinds of Atomic Force Microscope （AFM） supertips are discussed.

作者 Sergej Fatikow Volkmar Eichhorn Claas Diederichs

机构地区奥尔登堡大学微机器人与控制工程系(AMiR) OFFIS信息技术研究所

出处《光学精密工程》 EI CAS CSCD 北大核心 2013年第4期919-926,共8页 Optics and Precision Engineering

关键词纳米操作手纳米机器人自动化碳纳米管原子力显微镜 nanohandling nanorobotics automation carbon nanotubes AFM

分类号 TP241.2 [自动化与计算机技术—检测技术与自动化装置]

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纳米操纵机器人及其自动化设计(英文)

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