摘要
通过用波长为355nm的紫外激光对蓝宝石进行抛光,利用激光共聚焦扫描仪测量抛光后的表面粗糙度Ra,并结合抛光前后蓝宝石表面微观形貌特征观测,研究紫外激光脉冲能量、激光光束扫描速度、激光重复频率及激光光束入射角等工艺参数对蓝宝石表面粗糙度Ra的影响规律。
The 355nm wavelength UV laser is used in the research of the polishing experiment of sapphire in this paper. The surface roughness is measured by confocal laser scanner measurement. Also the surface morphology was analysis. From the research, it was show that the laser parametersaffect on mechanics and the roughness of sapphire was studied, which contain pulse energy, laser repetition rate, scanning speed, angle of incidence, scanning ways and the original surface.
出处
《漳州职业技术学院学报》
2013年第1期17-20,31,共4页
Journal of Zhangzhou Institute of Technology
关键词
紫外激光
激光抛光
抛光
工艺参数
表面粗糙度
UV laser
laser polishing
polishing
process parameters
surface roughness
