Ti_5Si_3的研究进展

Research Progress of Ti_5Si_3

概述了Ti5Si3的物理结构和化学性质,展现出其熔点高、密度低、电阻率低、硬度高、高温强度大、抗高温氧化性能好和化学性质稳定等性质。对Ti5Si3合金材料及其薄膜的固固、固液、固气和气气反应制备工艺及其优缺点进行了较为系统的阐述。并结合Ti5Si3的优良性能,对其在高温结构材料、镀膜材料、电子器件、微电极和微传感器材料领域的应用进行了重点介绍。

Ti5Si3 had been widely used as high temperature structural materials in aerospace fields. This review gives an overview of the scientific and technological aspects of of Ti5Si3 including the properties and structure of Ti5Si3 ,preparation techniques and its applications. The solid-solid, solid-liquid, solid-gas and gas-gas preparation methods of Ti5 Si3 thin films and alloy were systematically described. Combining with the low resistivity, excellent oxidation resistant and high-temperature stability, its applications in high-temperature structual materials, thin films, electronic components and microsensors were discussed.