摘要
受鱼类侧线结构的启发,设计了一种双T型结构的MEMS芯片。对该结构的核心元件T型梁进行最大应力与谐振频率分析,确定梁参数和压敏电阻的位置及其大小、尺寸。通过信号提取电路,对接收到的微弱电压变化信号值放大滤波后进行回波测距实验。测试结果得出:所设计的水听器可对水下障碍物进行距离探测,并实时LCD显示。
The design of a kind of double T - type structure MEMS chips is enlightened by fish＇ s lateral line structure. Structure parameters of T- type beam and varistor＇s position are determined based on the analysis of the maximum stress and resonant frequency. The weak voltage signal can be received well through amplifying and filter circuit. Finally, the experiment of echo ranging was conducted. Test results show that the hydrophone can detect the distance of submerged obstacles and realize the LCD real - time displaying.
出处
《科学技术与工程》
北大核心
2013年第11期2943-2947,共5页
Science Technology and Engineering
基金
国家863计划(2011AA040404)
国家自然科学基金(61127008/F040703)资助
