应用于MEMS加速度计的小型恒温系统的实现

The design and implementation of mini thermal-stable system applying to MEMS accelerator

介绍一种小型恒温系统的实现方法,使MEMS加速度计的工作区域温度保持恒定,从而改善MEMS加速度计的相关技术指标。小型恒温系统采用独特工艺,实现简单;恒温点可以根据环境温度的变化而改变,以降低功耗。实验结果表明,应用该系统的MEMS加速度计,由温度所引起的零点漂移值明显减小。

Temperature fluctuation is the major reason to influence the stability and performance of instruments. This paper presents a method for the implementation of mini thermal-stable system, which can keep the temperature surrounding MEMS accelerator constant. And then, some relative parameters of MEMS accelerator can be improved. This system is easy to get, with special technology, and can change the thermal-stabe working point to reduce power consumption. The result of experiment shows that, the zero-level drift of MEMS accelerator with thermal-stable system decreases obviously.