可见与近红外宽带减反膜的研制

Study and Fabrication of Visible and Infrared Broadband Antireflection Coating

为满足现代军用综合性光学仪器一机多用的要求,研制了500～1200nm波段宽带减反膜。采用混合H4、SiO2和MgF2三种材料制备宽带减反膜。通过实验分析了误差产生的原因,并借助膜系设计软件,对结果采用变尺度法进行模拟优化,最后在制备过程中通过改变每层的修正系数,解决了厚度误差对光谱特性的影响,最终用国产真空镀膜机制备了超宽带减反膜,在500～1200nm波段反射率平均小于0.5%。

In order to meet the modern military comprehensive optical instruments＇ operating requirements of one-machine multi-purpose, super broadband antireflection coatings with wavelength from 500 nm to 1200 nm are studied and fabricated. The broadband antireflection coatings are fabricated using mixed material H4, Si02 and MgF2 . The error causes are analyzed through experiments, and the result is simulated and optimized by variable metric method with the help of coating design software. By changing the master tooling of each layer in the process of fabrication, the effect of thickness error on the spectral properties is eliminated. Finally, the film is deposited by home-made vacuum coater, and the average reflectivity of the film is below 0.5% over the wavelength range from 500 nm to 1200 nm.