硅微压阻式压力传感器的测试与研究

The Test and Research of Silicon Micro Piezoresistive Pressure Sensor

设计了一种基于压阻式压力传感器的测试装置,该测试装置由压力容器、测试电路和温控系统三部分组成。利用该测试装置对实验室设计制作的压阻式压力微传感器压力输出特性进行了实验测试,并对测试结果进行了对比分析,结果表明该测试装置的设计是有效可行的,这为以后的传感器测试工作提供了参考基础。同时研究了不同环境温度对传感器灵敏度的影响。

The article designs a test device; the test device is composed by three parts of the pressure vessel, the test circuit and the temperature control system. The experimental testing and analysis are made for the pressure output characteristics of piezoresistive pressure micro-sensor with that test apparatus.