超薄BaTiO_3铁电薄膜隧穿机理研究

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摘要采用磁控溅射法制备超薄BaTiO3铁电薄膜,分析了电子隧穿过程,将电流-电压曲线作不同线性拟合,探讨单极性开关和双极性开关形成的物理机制。结果表明Pt/BaTiO3/Pt隧道结中存在SCLC机制、Schottky发射、P-F发射三种物理机制。

作者何苗章天金

出处《科技信息》 2013年第9期26-28,共3页 Science & Technology Information

基金国家自然科学基金项目项目编号为No.11174071 湖北省重大专项资助项目研究成果项目编号为No.2011AAA002

关键词 BATIO3 超薄铁电薄膜极性开关隧穿机制

参考文献8

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科技信息

2013年第9期

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