摘要
随着多晶硅产业规模不断扩大,多晶硅生产中的环境问题日益受到人们的关注。我国制备高纯多晶硅的主流技术是改良西门子法,物理冶金法制备高纯多晶硅企业有1~2家,是今后可能的发展方向之一。全面系统分析了改良西门子法和物理冶金法多晶硅生产中的产污环节、污染物种类及排污情况,为核算多晶硅产业产排污系数提供实践基础。
The environmental problems attracted people's attention in production of polysilicon with the development of polysilicon industry. The mainstream technology was the improved Siemens method to prepare of high - purity polysili- con. There was 1 - 2 to prepare of high - purity polysilicon by physical metallurgical method, which was one of the future development direction. Through the analysis of pollutant production, pollution discharge and the variety of pollutants in the polysilicon production of the improved Siemens method and physical metallurgical method, it provided the practical ba- sis to calculate pollutant production and discharge coefficients of polysilicon industry.
出处
《广州化工》
CAS
2013年第8期13-15,36,共4页
GuangZhou Chemical Industry
基金
中国环境科学研究院子课题"太阳能电池高纯多晶硅产业产排污系数研究"(编号:201209056)
关键词
多晶硅
改良西门子法
物理冶金法
产污
排污
polysilicon
improved Siemens method
physical metallurgical method
pollutant production
pollution discharge