激光束焦点位置波动的影响因素研究

Study on Influence of Laser Beam Focus on Position Fluctuation

随着激光加工在现代工业中得到广泛应用,对激光加工产品的质量要求越来越高。而激光束焦点位置的波动直接影响所加工产品的质量,因此对引起焦点波动的因素研究对控制产品质量有重要意义。通过对公式和实验数据的分析,得出影响激光束焦点位置波动的主要有透镜—工件距离的变化、光腔输出镜和聚焦镜的热变形及飞行光路中的不同光程3方面因素。

Along with the wide applications of the laser processing technology in modern industry, quality requirements is being higher and higher for society with laser processing products. While the laser beam focus position fluctuations directly affect the quality of processed products, thus researching factors which result the focus fluctuation to control the quality of products has important significance. Based on the formula and the analysis of experimental data, this text analyzed the effect of laser beam focus position fluctuations of the main lens the distance changes, resonator output mirror and a focusing mirror thermal distortion and flight optical path of the optical path in three different aspects.