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带驻留约束及双臂机械手的集束型设备群调度算法 被引量：3

Scheduling Algorithm of Dual-Arm Multi-cluster Tools with Residency Constraints
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摘要 根据集束型设备群的特点,对调度问题域进行描述,并提出了带驻留约束的双臂集束型设备群调度算法.该算法利用分解方法将集束型设备群分解为多个单集束型设备,并在此基础上提出一种基于机械手无冲突约束的搜索调度算法,调度目标是使到达晶圆在最短基本周期内完成加工.仿真实验分析结果表明,用所提出的算法进行集束型设备群的晶圆处理是有效的. According to characteristics of the cluster tools, a problem domain of the scheduling was sup posed and defined, and a scheduling algorithm of dual-arm muti-cluster tools with residence constraints was presented as well. A decomposition method is utilized to this algorithm to break multi-cluster tools into several independent single-cluster ones, meanwhile, a free-conflict constraint scheduling algorithm is presented with an objective of minimizing the fundamental period of the current wafers. Simulated experiments were designed to evaluate the proposed algorithm. The results indicate that the proposed algorithm is valid to schedule the wafers on the multi cluster tools.
作者 石潇铭 周炳海
机构地区 同济大学机械与能源工程学院
出处 《上海交通大学学报》 EI CAS CSCD 北大核心 2013年第4期650-655,共6页 Journal of Shanghai Jiaotong University
基金 国家自然科学基金资助项目(71071115)
关键词 集束型设备群 驻留约束 分解 调度 仿真实验 multi-cluster tools residency constraints decomposition scheduling simulation experiments
分类号 TP391.9 [自动化与计算机技术—计算机应用技术]
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参考文献12

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二级参考文献21

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共引文献12

同被引文献30

  • 1张奇峰,张艾群.基于能源消耗最小的自治水下机器人—机械手系统协调运动研究[J].机器人,2006,28(4):444-447. 被引量：11
  • 2Venkatesh S, Davenport R, Foxhoven P, et al. A steady-state throughput analysis of cluster tools: dual-blade versus single- blade robots [ J ]. IEEE Transactions on Semiconductor Manufacturing, 1997,10 (4) :418 - 424.
  • 3Yoon H J,Lee D Y. On-line scheduling of integrated single wafer processing tools with temporal constraints [ J ]. IEEE Transactions on Semiconductor Manufacturing ,2005,18 (3) : 390 - 398.
  • 4Yi J, Ding S, Song D, et al. Steady-state throughput and scheduling analysis of multi-cluster tools: a decomposition approach[J].IEEE Transactions on Automation Science and Engineering,2008,5(2) :321 -336.
  • 5Chan W K, Yi J, Ding S. Optimal scheduling of multi-cluster tools with constant robot moving times, part Ⅰ: two-cluster analysis [ J ]. IEEE Transactions on Automation Science Engineering,2011,8( 1 ) :5 - 16.
  • 6Chan W K, Yi J, Ding S. Optimal scheduling of multicluster tools with constant robot moving times, part Ⅱ: tree-like topology configurations [ J ]. IEEE Transactions on Automation .gcience EnQineering,2011.8 ( 1 ): 17 - 28.
  • 7Liu M X, Zhou B H. Modeling and scheduling analysis of multi-cluster tools with residency constraints based on time constraint sets [ J ]. International Journal of Production Research,2013,51 (16) :4835 -4852.
  • 8Dechter R, Meiri I, Pear J. Temporal constraint networks [J] Artificial Intelligence, 1991,49 ( 1/2/3 ) :61 - 95.
  • 9Kim H J, Lee J H, Kim C H, et ai. Scheduling in-line multiple cluster tools: a decomposition approach [ C ]//IEEE International Conference on Mechatronics and Automation. Chengdu, 2012 : 1544 - 1549.
  • 10高臣杰,张梅,胡跃明.基于遗传算法的链式约束排序问题的研究[A]第三十一届中国控制会议论文集B卷,2012.

引证文献3

二级引证文献12

上海交通大学学报
2013年 第4期

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