微机械硅桥的热激励挠曲及谐振频率变化的理论分析

Theoretical Analysis of the Deflection and Resonant Frequency of Micromachinced Silicon Bridge Excited Thermally

本文分析了镀膜双层微机械硅桥的热激励挠曲及谐振频率变化 ,建立了相应的数学模型 ,并对热挠曲灵敏度进行了优化设计 .同时在充分考虑金属镀膜影响的情况下 ,给出了谐振频率变化的计算模型 ,该模型通过和测试数据的对比 ,验证了其正确性 .

This paper have analysed the deflection and resonant frequency of the micromachaned silicon bridge with coating under thermal excitation. With the theoritical model induced, the optimization is done to the deflection and the model of the resonant frequency is verified by the experimental results in which the coating is considered.