一种新型三维MEMS电容式矢量水听器研制

Novel Tri-Axial MEMS Capacitor Vector Hydrophone

介绍了一种基于MEMS工艺设计的电容式矢量水听器。该矢量水听器的检测单元包括一个"三明治"结构敏感芯片和一个采用变送集成技术的信号调理电路。通过优化敏感芯片的结构和低噪声的信号调理电路,使矢量水听器得到很高的灵敏度、分辨率。利用MEMS微机械加工工艺制作出矢量水听器,检测单元相互正交并进行了声学灌封。矢量水听器完成了水下驻波场测试,测试结果表明:该矢量水听器的接收灵敏度在1 000 Hz时达到-180 dB(0 dB re 1 V/μPa),动态范围大于120 dB。

A capactitor vector hydrophone based on MEMS technology is introduced. The detection unit of vector hydrophone consists of a ＂sandwich＂ sensitive chip and a signal conditioning circuit transmitting integrated technique. By optimizing the structure of sensitive chip and low-noise signal conditioning circuit, vector hydrophone achieves a high sensitivity and resolution. The cross orthogonal detection unit of vector hydrophone is statically simulated by Fabricated and encapsulated by MEMS technology, and tested by underwater standing wave field. The test results show that the pressure sensitivity of vector hydro- phone reached -180 dB（0 dB =IV/μPa,1 000 Hz）,and dynamic range is more than 120 dB.