摘要
由于测量空间限制和孔本身的特点,孔径测量难度较大。本文设计一种简单易行、高精确度的测量方案,并对孔径载物台进行了设计。其干涉原理采用迈克尔逊干涉原理,数据的采集则采用CCD传感器。可以在大多数情况下实现孔径的测量,其测量精度达到微米级别。
Due to the measurement space＇s limitation and hole itself characteristic, the aperture measurement is difficult. The paper presents the design of a simple and high precision measurement scheme and the design of stage which to carry on aperture . The principle of interference is Michelson interference principle, data collection is use of the CCD sensor. In most cases to realize the measurement of aperture, and the accuracy of measurement reach to micron level.
出处
《工具技术》
2013年第4期58-60,共3页
Tool Engineering
