摘要
主要介绍半导体气敏传感器的类型,金属氧化物半导体气敏传感器气敏原理和特性参数,了解贵金属的掺杂效应,即通过添加贵金属的方法,改善传感器的灵敏度和选择性,综述了金属氧化物半导体气敏传感器添加贵金属改性的研究进展。
The types of semiconductor gas sensors, the gas sensing mechanism and Characteristic parameters of metal oxide semiconductor gas sensor were introduced. The precious metal doping effects were described. The sensi- tivity and selectivity of the sensor were improved by adding precious metals. The research progress of modify metal ox- ide semiconductor gas sensor by adding precious metals was summaried.
出处
《化工时刊》
CAS
2013年第3期45-47,共3页
Chemical Industry Times
关键词
气敏机理
特性参数
贵金属
gas sensing mechanism characteristic parameters precious metals
