摘要
为提高光刻机生产效率与国产化普及程度,论文设计了一种高效、低成本晶圆预对准装置。根据装置采样点数较低、预对准时间短的特性,对最小二乘圆法及质心法两种算法在晶圆形心定位中的使用特点进行探究,并通过仿真进行验证。提出最小二乘圆法较适用6 000点及以下低采样点的形心定位,而质心法在高采样点形心定位中更为适合,且有较强抗干扰能力。
In order to enhance the productivity of mask aligner, we＇ve designed an high efficiency and low cost wafer pre-align system. According to the small sample number characteristic, we make good use of Matlab Simulation to study the differences between LLS and centroid algorithm. We propose that LLS fit the small sample number situation, ie no more than 6 000/round, while centroid method suits big sample number system and has high capacity of antidisturbance.
出处
《机电一体化》
2013年第3期30-34,54,共6页
Mechatronics
基金
国家重大科技专项基金(2009ZX02012-001)
