摘要
多晶硅是太阳能和微电子产业的关键原材料,随着我国太阳能产业的快速发展,多晶硅的需求量也与日俱增。介绍了多晶硅的用途、分类,生产工艺进展,改良西门子法的工艺过程,分析了多数企业在多晶硅生产过程中废气和残液的处理过程及缺点,指出了一种废气处理的新工艺。
Polysilicon is a key raw material in solar energy and micro - electronics industry. With the rapid development of solar energy industry in China, polysilicon demands are also increasing. The application, classification and technology progress are introduced in this paper, Siemens process is im-proved, and shortcomings of waste gas and waste water treatment during production of polysilicon in majority of enterprises are analyzed, then a new tech- nology design for waste gas treatment is proposed.
出处
《轻金属》
CSCD
北大核心
2013年第4期71-73,共3页
Light Metals
关键词
多晶硅
废气
处理
工艺设计
polysilicon
waste gas
treatment
technology design
