基于场发射三极管的设计及性能研究

Design and properties study based on a triode field emission display

采用微波等离子体化学气相沉积法在不锈钢衬底上制备出了纳米非晶碳和碳纳米管混合薄膜,二极管结构测试表明薄膜材料具有优良的场发射性能。利用制备的薄膜材料作为阴极制作了前栅极结构的场发射三极管器件并对其性能进行了测试。结果表明该器件具有优良的栅控性能,亮度很高,有良好的应用前景。

A mixture of nano-amorphous carbon and carbon nanotubes films was synthesized on stainless steel plates by a micro wave plasma enhanced chemical vapor deposition system, h shows excellent field emission properties with diode structure. The cathode plate and anode plate were made of normal-gate triode structure field emission display （FED） panel and its field emission performance was tested. The experimental results show that the structure of nano-amorphous carbon find carbon nanotubes films with normal-gate triode structure FED has a good gale modulation, a good field emission performance and good application prospects.