大光程差弹光调制干涉仪的温度补偿策略及实现

Temperature Compensation Strategy and Implementation for Photoelectric Modulation Interferometer with Large Optical Path Difference

针对大光程差弹光调制干涉仪工作中的温漂问题,提出了一种包含电压和相位补偿的温度补偿控制策略。首先,根据相似与模化理论,建立了弹光调制干涉仪机械特性的等效电路模型,分析了温度对弹光调制干涉仪谐振频率的影响,建立了驱动电压、频率和谐振频率之间的数理模型,确定了大光程差条件下达到稳定状态的控制方法;然后,将数字锁相环技术与电压和相位补偿程序相结合,给出了包含电压和相位补偿的光程差偏移数字式控制设计方法;最后,将包含电压和相位补偿的数字式驱动控制系统与传统的模拟驱动控制系统进行对比测试,采用激光多普勒测振仪记录3小时内光程差偏移量。结果表明,该方法将长时间工作中温漂造成的光程差偏移率降低了约50%。

For temperature drift in hypervelocity photoelectric modulation interferometer, a control model of temperature com- pensation is presented including voltage and phase compensation. First, according to the similar and modeling theory, an equiva- lent circuit model of mechanical properties of hypervelocity photoelectric modulation interferometer was established, the impact of temperature drift on its resonance frequency was analyzed, a mathematical model was set up, which contains drive voltage, frequency and resonance frequency, and the control method was determined for high optical path difference to get steady. Then, a digital method including voltage and phase compensation is given for optical path difference deviation control, which merges the DPLL and program of voltage and phase compensation. Finally, the control method was tested through experiment system. A test between drive control system including voltage and phase compensation and traditional drive control system was executed, u- sing a laser doppler vibrometer to record the amount of change in optical path difference within 3 hours. Results show that the optical path difference deviation caused by temperature drift in long term is reduced by about 50%.