镁合金表面注N及直流磁控溅射Ti-TiN膜研究

Study of Ti-TiN films deposited on nitrogen implanted AZ31 magnesium alloys by direct current magnetron sputtering

在镁合金表面经注N后,通过改变Ar/N2流量比研究直流磁控溅射Ti-TiN膜对镁合金表面耐蚀性和耐磨性影响。利用扫描电镜(SEM)、X射线衍射(XRD)等手段分析镀膜的表面形貌和组织结构,通过显微压痕实验测定镀膜的结合情况,通过动电位极化和摩擦磨损试验研究镀膜的耐蚀性和耐磨性。结果表明:镁合金进行溅射清洗、氮离子注入再进行磁控溅射Ti-TiN膜,可以提高镀膜的结合效果,膜表面产生Ti、TiN晶相,可有效地改善镁合金AZ31的耐磨、耐蚀性能。其中,Ar/N2流量比为11∶2时,获得的注N及直流磁控溅射Ti-TiN膜其耐磨、耐蚀性最好。

The wear resistance and corrosion resistance of Ti-TiN films deposited on nitrogen implanted AZ31 magnesium alloy surface were studied by direct current magnetron sputtering （DCMS） with chan- ging the Ar/N2 flow ratio. Scanning electron microscopy （SEM） and X - ray diffraction （XRD） were em- ployed to study the surface morphology and structure of films. The bonding strength of the films was deter- mined by micro - indentation experiment. The corrosion resistance and wear resistance of the films were studied by potentiodynamic polarization tests and friction and wear tests. Results showed that the sputter cleaning of the magnesium alloy,nitrogen implantation and Ti-TiN Films depositing can improve the bond- ing strength of films, which can effectively improve the wear resistance and corrosion resistance. Ti and TiN crystalline phases were found in the films. The wear resistance and corrosion resistance of nitrogen ion implantation and Ti-TiN Films are best with a Ar/N2 flow ratio of 11 ： 2.