氢异常辉光放电阴极鞘层区中H_n^+的质谱分析

MASS SPECTRUM ANALYSES OF H_n^+ IN THE CATHODE SHEATH OF THE PURE H_2 ABNORMAL GLOW DISCHARGES

利用三级差分抽气的分子束质谱装置,对短间隙纯氢异常辉光放电阴极鞘层区中H+n(n=1～3)离子粒种及相对离子流强度与气压、放电电流的关系进行了研究。在133～665Pa氢气压下的放电离子流中,H+占90%以上,其次是H+3,H+2几近为零,且H+与H+3的离子流强度比值随气压升高迅速增加。同一气压下,放电电流在一定范围内变化只是改变总离子流的强度,而不同离子的相对离子流强度改变不大。

The ion species of H+n (n =1～ 3 ) and their relative intensities in the cathode sheath of the pure H2 abnormalglow discharges with various H2 gas pressure and different dis charge currentare analysed with a mass spectrometer.The resultshows that the H+component ofionsisdominated,no lessthan90 percent,and the H+3 smaller,the H+2 hardly detectable in the H2 pressure rangeof1 3 3 Pa to 665Pa.The ratio between H+and H+3 intensitiesincreaseswith the gas pressure.The totalintensity increases with the discharge current,and the ratio between H+ and H+3 intensities is unchanged.The main physics chemistry processes in the hydrogen plasma are discussed.