高准确度光学系统中材料非均匀性对成像质量的影响

Influence of Inhomogeneity of Optical Glass Used in High-precision Optical System on Imaging Quality

利用Zernike多项式对用Zygo干涉仪测得的离散材料折射率数据进行了拟合,再使用光线光学的方法评价了系统的成像质量.由于材料折射率分布的无规则性,在对包含非均匀介质的实际光学系统的模拟仿真和优化时,需要考虑选取材料不同部位加工成的透镜会对系统成像质量有不同的影响,而且加工好的透镜在装配过程中,绕着光轴旋转不同的角度同样会影响成像质量.通过计算机模拟的方法预先选取材料的最佳部位以及找到最好的装配位置,从而提高了光学系统的性能.

Inhomogeneity of optical glass used in high-precision optical system influences the imaging quality of the system. This kind of inhomogeneity can be expressed by Zernike polynomial expression with the discrete refractive-index data measured by ZYGO interferometer, in order to use the Fourth Order Runge-Kutta method for ray tracing. Due to the randomness of the material＇s refractive-index distribution, using different part of one piece of semi-finished optical glass to manufacture lenses with same parameter and rotating manufactured lens different degrees around the optical axis would influence the optical systemrs performance.