电子回旋共振等离子体源的数值模拟

NUMERICAL SIMULATION OF AN ELECTRON CYCLOTRON RESONANCE PLASMA SOURCE 

采用自洽微波功率吸收的二维混合模型,对电子回旋共振等离子体源中的各种物理参量(电离速率、等离子体密度、位势、电子温度)进行数值模拟.结果表明:等离子体参数随运行条件(中性气压和微波功率)变化呈现出区域特征。

Using a two\|dimensional hybrid\|model with self\|consistent microwave absorption,the variations of plasma parameters such as ionization rate,plasma density,plasma potential,and electron temperature with operation conditions were studied.Results of simulation show that nonlinear phenomena such as region character,saturation,and oscillation of plasma parameters can be developed when the operation conditions (pressure,power) were changed.