摘要
为减小在超光滑表面制造中对经验的依赖 ,为提高加工精度及重复精度 ,研制了采用锡磨盘的超精密平面研抛机。该机床集超精密车削与超精密研抛于一体 ,可以进行基于多种基本原理的超光滑研抛实验研究。介绍了超精密平面研抛机总体设计方案 ,主要包括机床的结构及精度设计的指导思想、关键部件的结构与驱动系统的方案选择以及机床的外部环境设计。
A bowl feed ultra precision polishing machine with a tin lap is developed for the purpose of reducing the dependence of operator's experiences The tin lap can be on line cut/repaired to flatness of 1μm/ φ 500mm by a sharp diamond bite Many polishing experiments based on different principles can be finished with this machine This paper gives an outline of the design and consideration of the machine, including the guidance of the mechanical structure, the selection of key functional units and the environment design of working
出处
《光学技术》
EI
CAS
CSCD
2000年第6期486-488,493,共4页
Optical Technique
