摘要
空气折射率的测量及补偿效果在高精度激光干涉测量中起着“瓶颈”作用。分析了空气折射率的补偿原理 ,研究了用预抽气真空腔测量和补偿空气折射率的测量原理、方法及装置 ,分析了该方法对测量误差产生的原因。最后对测量精度作出了估计。
The compensation effect for refractive index of air is the “bottle neck” factor in improving the accuracy of interferometric measurement The theory of compensation for refractive index of air is analyzed An interferometric device to measure the refractive index of air without air evacuation in the measuring process is studied A pre evacuated airtight sealed cavity with 45° slope is employed Some reasons to cause the measurement error are analyzed and the measurement accuracy is evaluated
出处
《光学技术》
EI
CAS
CSCD
2000年第6期499-501,505,共4页
Optical Technique
关键词
激光干涉测量
空气折射率
精度分析
真空腔
interferometry
refractive index of air
compensation
accuracy analysis
