微机械元件和仪器的新进展

New Progress of MEMS Component and Instru- ment Dalian University of Science and Technology

微机械元件和微机械仪器，适于大批量生产，具有成本低廉、性能优良和体积微小及集成度高的特点。近十年来，在研制、开发及市场扩大方面取得了巨大的进展，展现了美好的前景。

MEMS component and Instrument; are suitable for batch manufacture and have the ad vantage of low price, high reliability, smaller volume and large - scale integration. In tills decade a great progress has been made in the re search, development and marketing of this fief(l. which suggests a bright future