集成电路工艺技术及其应用的发展趋势

Developmental Trend of Processing Technology for Integrated Circuits and its Application

扼要介绍了通常的硅CMOS、双极和BiCMOS技术以及GaAs、GeSi技术的发展趋势,同时也介绍了高速集成技术发展中引入的一些新技术。

In this paper, the author describes a developmental trend of conventional Si CMOS, bipolar, BiCMOS, GaAs and GeSi processes, at the same time also presents some new techniques incoming in developing hi-speed integrating technology.