微纳米三坐标测量机测头的研究进展

Advances in Probes of Micro-nano Coordinating Measuring Machine

根据微纳米三维测量的发展和研究现状,首先归纳了三维微纳米测头的技术要求并进行分类,然后对国内外微纳米CMM测头的研究进展进行了介绍和比较,指出了各种类型测头需要解决的问题。针对这些测头的局限性,探讨了正在研究的新型三维谐振触发方法和触发测头。最后对微纳米三坐标测头的研究与开发趋势进行了总结和展望。

Probes are the key components of micro--nano CMM. According to the development perspective of micro--nano 3--dimensional measurement and its present research situation, the new requirements of the probes including contact probes, non--contact probes and probes developed with new technology, were described herein firstly. Then, the domestic and foreign research progresses of micro--nano CMM probes were reviewed and compared, and the main problems of two kinds of probes needed to be solved were listed. In order to overcome the shortages of these probes, a new de- veloping three--dimensional resonant trigger probe was discussed. Finally, the summary and prospect of the micro--nano CMM probes research and development were given.