阵列式硅压阻压力传感器的研究

Research on piezo-resistance pressure sensor array

介绍了一种阵列式硅压阻压力传感器 ,就其设计结构、生长工艺及实验结果进行了概要地阐述 ,其生长工艺将微机械加工工艺和半导体平面CMOS工艺融为一体。

A silicon piezo-resistance pressure se nsor array is introduced,the structure of array,fabricating process and result a re also briefly described.Fabrication of the sensor array is carried out using s ilicon micromachining techiques combined with semiconductor CMOS process.