摘要
为了在二维微驱动系统中实时检出磁性移动块的存在位置 ,提出并试制了一种基于MEMS工艺的微型磁性开关阵列 ,它作为一种位置传感器通过扫描查询方式工作。对该传感器的工作原理、制做工艺做了详细的描述 ,并给出了一些实验结果。
In order to sense the presence of magne tic slider in a two-dimensional micro electro-mechanical system (MEMS), the a uthors proposed and developed a novel micro magnetic switch array, which is used as a position sensor and functions by scanning. This paper introduces its sensi ng principle, fabrication process and some experimental results.
出处
《传感器技术》
CSCD
2000年第5期24-26,共3页
Journal of Transducer Technology
关键词
位置传感器
微驱动系统
MEMS
磁性开关阵列
micro electro-mechanical system(MEMS )
sensor
sensor array
switch
magnetic field
