自聚焦透镜的长度对斐索干涉仪面形测量的影响

Influence of the Length of SFL on the Measurement of Shape of Fizeau Interferometer

讨论了自聚焦透镜的长度对自聚焦透镜斐索干涉仪面形测量的影响 ,给出了面形干涉图中相邻干涉条纹半径的平方差随自聚焦透镜长度和面形曲率半径变化的三维曲线、待测面 R→∞时的二维曲线以及自聚焦透镜的长度对面形测量范围的影响 ,并用平面作待测面给出实验值 。

In this article, the influences of the length of SFL on the measurement of the shape of Fizeau interferometer is discussed. The 3 D diagram of the square difference of the nearest interferometric stripe radius changing with the length of SFL and the radius of measured surface, and the 2 D curve between the difference and the length at R→∞ are given. On the other hand, the relationship between the measured range and the length of SFL and the measured precision is also given. At last, through experiment the coinsidence between experimental and theoretical result is demonstrated.