小周期多层膜的小角X射线衍射强度研究

Study of Small Angle X-ray-diffraction Theory of Multilayer for Water Window Reign X-ray

水窗波段 X射线反射元件的特征是周期比较小 ,吸收层和间隔层很难形成连续的膜面 .提出了这种膜系内密度变化的简单物理模型 ,通过理论衍射强度计算和小角 X衍射实验证明这种模型是合理的 .同时理论上证明这种模型仍然有较强的小角 X射线一级反射强度 ,其强度相当于结构参数相同的理想尖锐界面多层膜一级反射强度的 70 %～ 80 % .对于小周期的多层膜设计 。

Because the period of reflector for water window X ray reign is very small, it is difficult to get a continue surfaces of the absorption and spacing layers. This paper presents a simple physical model of change of mass density for calculating the diffraction intensity of multilayer, which is proved by the experiments of the small angle X ray diffraction. The theoretical analysis and experimental results show that the density distribution multilayer can produce a first strong diffraction intensity which is about 70%~80% difffraction intensity of that with sharp interface.