离子成分比对等离子体浸没离子注入圆柱形介质管内表面鞘层演化特性的影响

Simulation of Plasma Immersion Ion Implantation into Cylindrical Polyethyene Terephthalate Tube

采用一维和双离子自洽流体模型研究了等离子体浸没离子注入圆柱形聚对苯=甲酸乙=醇酯介质内表面的离子鞘层动力学。在模型中,考虑工作气体为氮气时离子成分为氮原子离子N+和分子离子N2+。计算结果表明,不同的离子成分比具有不同的鞘层演化特性,氮原子离子含量高会导致严重的充电效应。在实际工艺中,可通过调整相关参数以降低原子离子N+的成分以抑制充电效应。

We addressed the inner-surface modification of a polyethyene terephthalate（PET）tube by plasma immer- sion ion implantation. The system was modeled and simulated on the basis of fluid dynamics. The impacts of the implanta- tion conditions, such as the concentrations of atomic and molecular nitrogen ion, N＋ and N2 ＋ , and the ratio between two ion species,on the sheath evolution was evaluated. The simulated results show that the concentration ratio of N＋and N2 ~ ion significantly affects the sheath evolution and the implantation. For example, excessive atomic ions of nitrogen result in a severe charge accumnulation on the PET surfaces. We suggest that in practice, the charge accumulation may be eliminated by reducing the concentration of atomic nitrogen-ion.