单振子多自由度压电马达研究

Research on Multi-freedom Degree Piezoel ectric Motor Using Unique Vibrator

提出用单一振子产生多自由度运动的压电马达的设想 ,分析了产生多自由度运动的原理 ,设计、研制了矩形板式、圆环式多自由度压电马达的结构 ,并进行了实验研究。实验结果证明能够实现预想的多自由度运动。

In this paper,w e put forward the conceive of multi-free dom degree piezoelectric motor using uni que vibrator,analyze their working princ iple,design and make out the real multi- freedom degree piezoelectric motor using rectangle plate type vibrator and ring type one.We have the experiment,the resu lt states multi-freedom degree movement we expected could be fulfilled using the m.