摘要
用热丝ＣＶＤ法，以丙酮为碳源，在ＷＣ－Ｃｏ硬质合金衬底上沉积金刚石薄膜，研究了碳源浓度对金刚石薄膜涂层刀具性能的影响，结果表明，碳源浓度对金刚石涂层薄膜质量、形貌和粗糙度、薄膜与衬底间的附着力、刀具的耐用度及切削性能有显著影响，合理控制碳源浓度对获取实用化的在硬质合金刀具基体上沉积高附着强度。低粗糙度金刚石薄膜的新技术具有重要的意义。
The diamond thin film is deposited on WC- Co cemented carbide substrate using the acetone as the carbon source by the hot filament chemical vapor deposition(HFCVD). The influence of the carbon source concentration on mechanical properties of diamond-coated thin film tools have been investigated. The results show that increasing the carbon source concentration greatly affects the surface roughness, morphology, chemical quality, adhesion strength, and the cutting performances of the diamond-coated thin film tool. It is of great significance for practical application of the new technology of depositing diamond thin film with low surface roughness and high adhesion strength on the cemented carbide substrate by appropriately controlling the carbon source concentration.
出处
《金刚石与磨料磨具工程》
EI
CAS
2000年第5期3-6,共4页
Diamond & Abrasives Engineering
基金
国家863计划新材料领域资助项目!(715-002-0010)
关键词
涂层刀具
金刚石薄膜
碳源浓度
性能
磨损
diamond-coated tool, diamond thin film, carbon source concentrat
