摘要
文章提出了一种基于DVD原理的非接触光学聚焦探头,它由商用DVD读取头改装而成,已经完成设计与制作。实验结果表明,此非接触探头分辨率优于1nm,测量重复性可达12nm。目前此非接触触发探头已应用于纳米三坐标测量机上。
This paper presents a non-contact trigger probe based on the commercial DVD pick-up head. The focus sensor and the mechanism have been designed and manufactured. Experimental results show that the non-contact trigger probe can obtains 1 nm resolution and a repeatability of 12nm. The non-contact trigger probe can be used on a micro/nano CMM.
出处
《现代显示》
2012年第12期35-40,共6页
Advanced Display
基金
国家自然基金项目(编号:50675057)
