摘要
共焦测量方法以其独特的光学截面分辨能力和高精度的轴向分辨率受到极其广泛的关注．近年来提出的利用微光器件分割光路的思想实现了非扫描共焦成像．本文给出了共焦测量系统的结构，着重讨论了对微光器件的参数要求以及制作过程和理论分析，并结合实验系统给出实际制作的微光器件的具体参数．
The confocal image measurement system owns the advantages of high resolution in cross section and high precision in axial direction. Recently multiple-beam confocal image system is developed. It makes the measurement non-scanning and high speed. This paper gives the structure of the confocal multiple--beam image system and pays attention to the fabrication of micro-lens device. It includes the parameter analysis and fabrication art etc.
出处
《光电子技术与信息》
CAS
2000年第4期21-24,共4页
Optoelectronic Technology & Information
