Al_2O_3陶瓷表面的准分子激光活化沉积金属Cu技术

Excimer laser induced surface activation of alumina ceramics for electroless copper deposition

本文研究了通过XeCl准分子激光照射Al2 O3陶瓷表面后 ,使其表面沉积金属Cu的技术。实验结果表明 ,Al2 O3试样浸入Cu2 SO4 溶液后 ,金属Cu膜只沉积于激光照射区。经准分子激光照射 ,Al2 O3 表面结构的变化和Al富集区的产生是金属Cu沉积的主要原因。

In this presentation,selective Cu deposition on alumina(Al 2O 3)after XeCl excimer laser irradiation was described.After immersion in Cu 2SO 4 solution,the metal films of Cu Were only deposited on the laser irradiated area.Following excimer irradiation,modification of surface crystalline structure and formation of Al rich area are the main reasons for deposition of Cu on alumina.