摘要
纳米结构薄膜和涂层在绿色技术领域的重要性与日俱增。本文讨论了它们的主要制备方法以及其在绿色技术领域(如太阳能利用和提高能源使用效率)里的潜在应用。着重介绍了真空或等离子体环境中的制膜技术,也包括了一些其他方面的工艺。工业化大规模沉积法生产薄膜的方法也进行了详细的讨论,并且对其未来的发展做出了展望。
Nanostructured thin films and coatings are increasing importance to clean technologies. This re- view presents their primary preparation methodologies and potential applications in clean technologies, such as solar energy and energy efficiency. Techniques involving vacuumplasma-based environments (e- vaporation and sputtering in particular) are highlighted as well as a broad range of other approaches being exhibited. Detailed discussion on large-scale deposition is also included, and perspectives are provided on possible future developments.
出处
《热处理技术与装备》
2013年第2期1-5,共5页
Heat Treatment Technology and Equipment
关键词
薄膜
涂层
沉积
绿色技术
纳米结构
thin film
coating
deposition
clean technologies
nanostructure