MEMS同振型仿生矢量水听器实验测试

Experiment Research on MEMS Resonant Type Bionic Vector Hydrophone

MEMS(Micro Electro Mechanical System,微机电系统)同振型仿生矢量水听器采用MEMS二维仿生矢量水听器和标准声压水听器一体化封装,保证了通道间的严格正交,海试环境下性能测试具有"8"字形余弦指向性和较高的灵敏度。在性能测试的基础上对水听器的定向能力进行了实验研究,实验结果表明:同振型矢量水听器能够实现声目标定向(定向误差小于3°)和运动目标的航迹跟踪,为后续的工程化应用打下了基础。

MEMS resonant type vector hydrophone adopted an integrated package of MEMS bionic vector hydrophone and standard pressure hydrophone ,thus guaranteeing a strict orthogonal between the axises. When the hydrophone was tested under the sea environment,it showed cosine directivity in the shape of 8 and a high sensitivity. The hydrophone＇ s capacity of orientation was researched based on the performance test, and the result shows that the resonant type vector hydrophone can realize the directionality of an acoustic target （with a directionality error less than 3 degree ） and track the course of a moving object, an improvement which builds a strong foundation for subsequent engineering application.