摘要
MEMS技术是在微电子和半导体技术及超精密机械加工技术基础上发展起来的多学科交叉的前沿研究领域。基于MEMS技术制造的传感器具有高集成度、高灵敏度、高分辨率、智能化、低功耗、低成本等优点,为海洋观测技术的智能化、网络化、小型化提供了技术支持和发展方向。从MEMS传感器的基本原理出发,介绍了MEMS传感器技术及其在海洋观测中的应用。
MEMS technology is a multidisciplinary and cutting-edge research field, which is developed from the microelectronics and semiconductor technology and ultra-precision machinery processing technology. Sensor based on MEMS technology has the advantage of high integration, high sensitivity, high resolution, intelligent, low-power and low cost, which provided technical support and direction of development for marine observation technology in intelligence, networking, miniaturization. This article introduced MEMS-based sensor technology from and the basic mechanism of MEMS-based sensor, and presented some of its application in ocean observation.
出处
《信息技术》
2013年第4期141-144,共4页
Information Technology
