摘要
利用射频磁控反应溅射方法,以Al-Tm合金为靶材,Si(100)为衬底,制备了铕(Tm)掺杂的氮化铝(AlN)薄膜.利用X-射线衍射仪(XRD)和原子力显微镜(AFM)研究了退火温度对样品结晶形态和表面粗糙度的影响.XRD测试结果表明,经高温退火处理后的样品具有良好的(100)择优取向;AFM测试表明,适当温度退火后的薄膜更加致密、平整;X-射线能量谱(EDS)测试表明,薄膜主要组分为Al、N、O、和C元素,但C、O主要吸附于薄膜表面,Al和N的含量接近于AlN的化学计量比;光致发光光谱(PL)测试表明,Tm掺杂的AlN薄膜发光中心位于468nn,对应于可见光谱中的蓝色光,退火温度对发光强度有重要影响.
Tm-doped AIN thin films have been deposited on Si(100) substrate by using radio frequency reactive magnetron sputtering system with as A1-Tm alloy target. The effects of annealing-temperature on the crystalline structure and surface morphology of the films was investigated by X-ray diffraction (XRD) and atomic force microscopy (AFM). The annealed films shows an excellent preferred orientation of (100) and surface roughness can be improved by a suitable annealing. The compositions of the films were characterized by EDS. EDS data show that A1, N, C and O elements exist in the A1N films, while C and O elements mainly exist on surface. Moreover, the films present a composition highly close to A1N stoichiometric. The photolumi- nescenee (PL) spectra shows that the characteristic emission band of Tm-doped AIN is at 468 nm, which is correspond to blue light in the visible light spectra. Moreover, the PL intensity at 468 nm is seriously affected by annealing temperature.
出处
《嘉兴学院学报》
2013年第3期65-68,共4页
Journal of Jiaxing University