摘要
针对原子力显微镜(AFM)微悬臂的柔性特征,提出了一种基于时空变量分离的模糊PID控制方法。由于AFM的微悬臂探针的运动精度非常高,对扰动很敏感,因而需建立微悬臂的分布参数系统模型。在保持柔性微悬臂的空间振动特性的基础上,将基于时空变量分离控制方法,结合鲁棒性强的模糊PID控制方法运用到AFM微悬臂探针的控制上,这样使控制器的设计不用考虑空间耦合的影响。通过实验仿真结果,这种方法有效地提高了AFM的微悬臂探针的控制性能和稳定性。
To meet the flexible characteristics of micro-cantilever in Atomic-Force-Microscope （AFM） , this paper puts forward a fuzzy PID control method based on the separation of time-spatial variables. Because the AFM micro-cantilever has the very high Kinematic Accuracy requirement, and is sensitive to disturbance, it＇s necessary to use distributed parameter system in cantilever model. By keeping the spatial vibration characteristics of AFM cantilever, the combination of two control methods is applied to the control of AFM cantilever. So it does not need to consider the effect of spatial coupling in designing controller. The simulation result has shown that the control accuracy of tip position is effectively improved by using this method.
出处
《控制工程》
CSCD
北大核心
2013年第3期456-459,465,共5页
Control Engineering of China
基金
国家自然科学基金资助项目(51175519)
中南大学博士后基金资助项目
关键词
原子力显微镜
微悬臂
分布参数系统
模糊PID
atomic force microscope
micro-cantilever
distributed parameter system
fuzzy PID
