离子束增强沉积改性层中碳化物相的电镜研究

TEM investigation on carbides in modified layers by ion beam enhanced deposition

主要研究 Ｍ ２ 高速钢离子束增强沉积表面改性层中碳化物相的组织形态与相结 构的变化情况。结果表明，高能离子束可穿透表面氮化物涂层并注入基体，轰击其主 要碳化物相Ｍ６Ｃ，使其形成包括“嵌镶块”和“晶界结构特征花样”等亚结构组织和 缺陷。这为进一步研究其表面强化机制等提供了重要实验依据。

This paper mainly investigates the morphologies and phase structure of carbides in the modified layers on the surface of M2 high speed steel by Ion Beam Enhanced Deposition. The results indicate that energetic ions can pene- trate into nitride films and implant into the substrate. The substructures such as fragments and structure line occurring inside M6C owing to ion bombardment. These results will provide important experimental basis for us to study the strengthening mechanism of the surface modified layers.