飞秒激光诱导自组织纳米周期结构及其光学特性的研究进展

The development of femtosecond laser-induced periodic nanostructures and their optical properties

飞秒激光具有超快、超强的特点.飞秒激光微纳加工发展非常迅速.本文综述了近十年来利用飞秒激光在金属、半导体、介质等各类材料中制备的纳米周期结构,阐述了若干关于飞秒激光诱导纳米周期结构的物理机理的观点.讨论了基于偏振调制的多光束干涉在半导体表面制备纳米周期结构,简要叙述了周期结构对材料光学特性的影响.

Micromaching by using femtosecond laser has been developing rapidly. This paper introduces the main developments in the last ten years on the formation mechanisms of periodic ripples in metals, semiconductors, and dielectrics induced by femtosecond lasers. By combining the methods of multi-beam interferences with the self-organized periodic nanostructures, two-dimensional periodic complex nanostructures can be fabricated on the surface of semiconductors. Compared with that of plane surface, the photoluminescence of nanostructures increases greatly.