AZO超高致密度化工艺研究

Densification Process of AZO Targets

以ZnO和Al2O3为原料,采用冷压成型-高温烧结致密的方法制备超高致密度的AZO靶材。通过实验优化得到的最佳制备AZO靶材的工艺参数是:WAl2O3为2%、锻压压力11MPa、高温烧结温度1200℃,烧结时间5小时,按此条件,制备的AZO靶材相对密度最大(96.63%)。其次是:WAl2O3为4%、锻压压力13MPa、高温烧结温度1300℃、烧结时间2小时,得到的AZO靶材相对密度96.04%。

The aluminum zinc oxide （AZO） targets were densified by cool pressure-sintering technique. The experiments weredesignedtoexploretheinfluenceoffourimportantfactors, i,e WAl2O3（%）, pressure （MPa）, sintedng temperature （℃） and sintering time （h）, on the relative density of AZO targets, and to determine the densification parameters for AZO targets with maximal relative density. The research results have shown that the best conditions for the preparation of AZO targets with high relative density are as follows：WAl2O3, 2%, pressure 11 MPa, sintering temperature 1200℃, and sintering time 5 h; or, WAl2O34%, pressure 13 MPa, sintering temperature 1300 ℃and sintedng time 2 h. Under these conditions, the values of relative density of AZO targets are the largest （96.63% and 96.04%, respectively）.