机床滚转角测量中敏感元件倾斜引起的误差分析

Measurement Error Analysis for Machine Tool Roll Error Measurement Due to Inclined Half Wave Plate

为研究正交偏振光相位法测量机床滚转角过程中,机床的俯仰、偏摆运动误差对测量精度的影响,建立了测量光路数学模型,利用琼斯矩阵法计算光路中光的偏振态变换过程,并推导出被测滚转角与相位变化量间的测量公式。在此基础上,采用光的偏振和晶体光学理论,分析了测量过程中机床俯仰、偏摆运动误差造成的敏感元件(即1/2波片)倾斜所引起的测量误差。分析结果表明,1/2波片在倾斜角度小于2°的情况下所引起的测量误差小于0.1%,对测量精度影响较小,从而论证了正交偏振光相位法高精度测量机床滚转角的可行性。

To evaluate the influence of motion error of the roll error measurement, a mathematical model was of the lasers through the measurement system was machine tool, such as pitch and yaw, on established, then the conversion process calculated by Jones matrix method and measurement formula between the phase and the roll error was ultimately derived. The measurement error caused by angular motion error of the sensitive component, ie the half wave plate, was analyzed theoretically following polarization and crystal optics theory. Results show that the measurement error gets less than O. 1% which illustrates the feasibility of the method for roll error measurement by orthogonally polarized lasers.